Advanced Micro and Nanosystems [Updated at 2016.02.02]

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02. CMOS-MEMS (2005).pdf 63.2 MB
01. Enabling Technology for MEMS and Nanodevices (2004).pdf 46.8 MB
08. Carbon Nanotube Devices - Properties, Modeling, Integration and Applications (2008).pdf 26.7 MB
03. Microengineering of Metals and Ceramics (2005).pdf 8.6 MB
10. System-Level Modeling of MEMS (2013).pdf 8.0 MB
07. LIGA and Its Applications (2008).pdf 7.4 MB
22. Resonant MEMS - Fundamentals, Implementation and Application (2015).pdf 7.4 MB
12. Micro Energy Harvesting (2015).pdf 6.7 MB
05. Micro Process Engineering - Fundamentals, Devices, Fabrication, and Applications (2006).pdf 6.6 MB
06. Reliability of MEMS - Testing of Materials and Devices (2008).pdf 5.5 MB
09. Inkjet-based Micromanufacturing (2012).pdf 5.4 MB